The Alcatel 5400 turbo molecular high vacuum pumps have a pumping speed of 400 liters per second (l/s) and can get to an ultimate pressure of about 6 E-9 torr pressure. The Alcatel 5400 turbo molecular pump inlet is CF 8 inch with an ISO KF-25 exhaust foreline flange.
The Alcatel 5400 CP turbo molecular high vacuum pumps have a pumping speed of 400 liters per second (l/s). The Alcatel 5400 CP turbo molecular pump inlet is LF 160 with a ISO KF-40 exhaust foreline flange.