The Alcatel 5150 turbo molecular high vacuum pumps have a pumping speed of 150 liters per second (l/s). The Alcatel 5150 turbo molecular pump inlet is Conflat CFF 6 inch with a ISO KF-25 exhaust foreline flange.
The Alcatel 5150CP turbo molecular high vacuum pumps have a pumping speed of 150 liters per second (l/s). The Alcatel 5150CP turbo molecular pump inlet is LF 100 with a ISO KF-25 exhaust foreline flange.