MKS GM50A Mass Flow
产品详情MKS GM50A Mass Flow Controller (MFC) Digitally-Controlled, Range of 0.4 to 20 sccm, 15-pin D-subminiature, 4 VCR Male.
MKS Part Number: GM50A013201RMM020.
The MKS GM50A Mass Flow Controller is capable of being configured to control N2 or equivalent, having a Full-Scale Flow Range of 20 sccm and a control range of 0.4 to 20 sccm. It has a 15-pin D-subminiature analog connector with tied grounds, a 0-5 VDC flow input/output signal and a Swagelok® 4 VCR® male input and output fittings. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.